Monte Carlo simulation of radio-frequency breakdown in argon
1 : Institute of Physics, University of Belgrade, POB 68 11080 Zemun, Belgrade, Serbia
In this paper we employ Monte Carlo (MC) collision code to model radio-frequency (RF) breakdown. Electron dominated regime and conditions which lead to the breakdown were examined in an attempt to identify the most pertinent processes. We focus on scaling conditions based on breakdown voltage curves. Influence of surface effects on a breakdown voltage curve is also observed.
