Gas Chemistry related to the operation of MicroHollow Cathode Discharges
1 : Groupe de recherches sur l'énergétique des milieux ionisés
(GREMI)
-
Website
CNRS : UMR7344, Université d'Orléans
14 Rue d'Issoudun - BP 6744 45067 ORLEANS CEDEX 2 -
France
3 : University of Texas at Dallas
(UTD)
* : Corresponding author
800 W. Campbell Road, RL10, Richardson TX 75080-3021 -
United States
Instabilities obtained in silicon micro hollow cathode discharges (MHCD) were
investigated using a high speed video camera and analysing SEM pictures of
the electrodes after the operation of the microplasma. We show that the
damage done to the electrodes of the microdischarge device is linked to
the optical and electrical characteristics of the discharges.
Modifications induced by these discharges in a gas mixture containing SF6
were also studied using in-situ infra-red (FTIR) spectroscopy. This research is intended
to help overcome the present limitations of such devices in order to
make them more reliable and more robust.
