Thursday 10
E. Low Pressure Plasmas and Applications
Chair: P. Brault, M. Mikikian - Each talk is 10'+2' duration
› 11:30 - 11:45 (15min)
› Blaise
Oscillating movement in N2/CH4 dusty RF plasmas
Jean-François Lagrange  1@  , Isabelle Géraud-Grenier  1  , François Faubert  2  , Véronique Massereau-Guilbaud  1@  
1 : Groupe de recherches sur l'énergétique des milieux ionisés  (GREMI)  -  Website
CNRS : UMR7344, Université d'Orléans
Rue Gaston Berger, BP4043 18028 Bourges Cedex, France -  France
2 : IUT de Bourges, Département Mesures Physique
Université d'Orléans
63 avenue de Lattre de Tassigny 18020 Bourges Cedex -  France

Dust particles produced by Physical Enhanced Chemical Vapour Deposition (PECVD) in a capacitive discharge (13.56 MHz), can show a particular behaviour for specific discharge conditions and gas composition. Therefore, at a pressure of 120 Pa in a CH4-N2 mixture injected with a constant total gas flow rate of 5.6 sccm and a RF power of 80 W, the particles located above the grounded electrode have a periodical and vertical movement throughout the plasma bulk. This phenomenon only occurs for the following geometry of the grounded electrode: presence of through holes in the plate (used for particle collect) put on the grounded electrode.

The movement is linked to the competition between the forces acting on particles. Holes work as attractive poles and disturb the “classical” competition of forces, leading to the particle levitation in the cloud near the grounded electrode. We will discuss about the effect of the holes presence making the cloud above the grounded electrode moves vertically.


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