Iwabuchi Hiroyuki

Wednesday 9
C. Glows and Breakdown
Chair: K. Hidaka, U. Ebert - Each talk is 10'+2' duration
› 11:30 - 11:45 (15min)
› Blaise
Polarity effect on breakdown phenomenon across micrometer-scale surface gap in atmospheric air
Hiroyuki Iwabuchi  1, *@  , Shigeyasu Matsuoka  1  , Akiko Kumada  1  , Kunihiko Hidaka  1  
1 : The University of Tokyo
* : Corresponding author

With the miniaturization of MEMS (micro electromechanical systems) devices, the insulation width and the separation between electrodes in such devices have been accordingly reduced. Consequently, electrical breakdown phenomenon across micrometer-scale gap is of great practical interest for insulation designing of miniaturized devices. In this paper, breakdown and pre-breakdown phenomenon under impulse voltage application across micro-meter scale gaps fabricated on SO wafers were observed. Prior to the breakdown, it is observed that current pulse flows. Changing the electrode configuration and the application voltage polarity, charge quantity, current pulse waveform, and sparkover voltage are measured. The discharge process across micrometer-scale gap was investigated.


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