Using Plasma Simulation as a Smart Controller of Microwave Discharge Devices for Material Processing
1 : Dept. Electrical and Electronic Engineering, Kobe University
* : Corresponding author
Nada-ku, Kobe 657-8501 -
Japan
Proposed is a novel microwave plasma device control system based on physics, in which a fluid simulation is used
to obtain a device control parameter necessary to produce a target density profile. This means that the input and output
is reversed in the simulation compared to the conventional ones. It is shown that by following the output of this hyper simulator,
radial profiles of produced plasmas are in good agreement with the target density profile.
