Taniguchi Rie

Thursday 10
E. Low Pressure Plasmas and Applications
Chair: Z. Petrovic - Each talk is 10'+2' duration
› 15:20 - 15:35 (15min)
› Blaise
Using Plasma Simulation as a Smart Controller of Microwave Discharge Devices for Material Processing
Yasuyoshi Yasaka  1, *@  , Rie Taniguchi  1  , Kazuhiro Kobayashi  1  
1 : Dept. Electrical and Electronic Engineering, Kobe University
Nada-ku, Kobe 657-8501 -  Japan
* : Corresponding author

Proposed is a novel microwave plasma device control system based on physics, in which a fluid simulation is used 

to obtain a device control parameter necessary to produce a target density profile. This means that the input and output 

is reversed in the simulation compared to the conventional ones. It is shown that by following the output of this hyper simulator, 

radial profiles of produced plasmas are in good agreement with the target density profile.


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